Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology Saburo Nonogaki

ISBN: 9780824799519

Published: June 25th 1998

Hardcover

336 pages


Description

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology  by  Saburo Nonogaki

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology by Saburo Nonogaki
June 25th 1998 | Hardcover | PDF, EPUB, FB2, DjVu, talking book, mp3, ZIP | 336 pages | ISBN: 9780824799519 | 3.18 Mb

Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews theMoreExplores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.

Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials.



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